Semiconductor Process Cooling

Semiconductor Chillers

Inverter Chiller
  • Inverter Chiller
  • Inverter Chiller
Inverter Chiller
  • Process Chiller Type: Water medium, air-cooled chiller

Variable frequency chillers adjust compressor speed according to the cooling demand, which helps control water temperature more accurately and avoid unnecessary energy consumption. The compressor, motor, and fan automatically change their working speed based on equipment load to keep stable cooling performance. These water chillers are used for precision equipment such as laser cutting machines, worm grinding machines, semiconductor equipment including etching machines, lithography machines, ion implanters, as well as medical diagnostic and imaging systems.

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Specification Sheet
Specifications
Model AWI25PTS-1225
Cooling Capacity (50HZ) 2500W
Power Main circuit Single Phase AC 220V-240V 50Hz
Control circuit Single Phase AC 220V-240V 50Hz
Enclosure Paint RAL-7035
Dimensions 450×500×1040mm
Compressor Rotary compressor
Evaporator Stainless steel plate heat exchanger
Condenser Cross-fin coil type condenser
Fan Blade Propeller fan blade
Heating Element 304 stainless steel
Water Pump Power 0.55kW
Rated flow (50Hz) 30L/min (0.35Mpa)
Temperature Control Select one of the following two modes:
Differential temperature control mode (adjustable range: -9.9°C to +9.9°C)
Constant temperature control mode (inlet temperature setpoint range: 5°C to 40°C)
Refrigerant Control Electronic expansion valve
Protection Devices Overcurrent protection
Restart prevention timer
High oil temperature protection
Low oil temperature protection
Temperature Control Accuracy ±0.1℃
Refrigerant R410a
Water Tank Capacity 20L (pure water)
Temperature Range Room temperature 10℃ to 45℃
Inlet temperature 10℃ to 40℃
Connection Size Inlet G 1/2”
Outlet G 1/2”
Drain port G 1/2”
Water filling port G 1”
Weight 60kg
Standard Accessories User manual
Test Conditions Room temperature: 35℃ Outlet temperature: 25℃
Features
  • Inverter chillers provide precise temperature control with 0.1-second response speed, matching high-frequency processing cycles in semiconductor equipment such as etching and deposition machines while reducing thermal deformation and uneven processing results.
  • The variable frequency control avoids frequent start-stop operation found in fixed-speed units, reducing energy waste and achieving 20%–50% energy savings under partial load conditions.
  • Low-power standby operation reduces power consumption to only one-third to one-fifth of fixed-speed chillers during light-load conditions.
With over a decade of dedication to industrial process cooling and thermal management for industrial equipment, we have established us as a reliable manufacturer of industrial process chillers, enclosure air conditioners, air-air heat exchangers and oil mist collectors. We understand that every production process has different thermal requirements and operational demands. From CNC machining and semiconductors to laser processing and electronics manufacturing, we deliver the industrial cooling solutions designed to keep your production and operation running with temperature consistency and thermal stability. With all industrial chillers and industrial equipment thermal control systems certified by CE and ISO, we are committed to assisting you in optimizing production efficiency, minimizing downtime and reducing operational costs.